Iron distribution in silicon after solar cell processing: Synchrotron analysis and predictive modeling
The evolution during silicon solar cell processing of performance-limiting iron impurities is investigated with synchrotron-based x-ray fluorescence microscopy. We find that during industrial phosphorus diffusion, bulk precipitate dissolution is incomplete in wafers with high metal content, specific...
Main Authors: | Fenning, David P., Hofstetter, Jasmin, Bertoni, Mariana I., Hudelson, S., Rinio, M., Lelievre, J. F., Lai, Barry, del Canizo, C., Buonassisi, Tonio |
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Other Authors: | Massachusetts Institute of Technology. Department of Mechanical Engineering |
Format: | Article |
Language: | en_US |
Published: |
American Institute of Physics (AIP)
2013
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Online Access: | http://hdl.handle.net/1721.1/78005 https://orcid.org/0000-0002-4609-9312 https://orcid.org/0000-0001-8345-4937 |
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