Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2013
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| Online Access: | http://hdl.handle.net/1721.1/78161 |
| _version_ | 1826208491057971200 |
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| author | AlSaeed, Abdulelah (Abdulelah Ibrahim) |
| author2 | Jung-Hoon Chun. |
| author_facet | Jung-Hoon Chun. AlSaeed, Abdulelah (Abdulelah Ibrahim) |
| author_sort | AlSaeed, Abdulelah (Abdulelah Ibrahim) |
| collection | MIT |
| description | Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. |
| first_indexed | 2024-09-23T14:06:30Z |
| format | Thesis |
| id | mit-1721.1/78161 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:06:30Z |
| publishDate | 2013 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/781612019-04-11T10:39:35Z Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling Elimination of lead zirconate titatate thin film breakage caused by electric current arcing and intrinsic differential strains during poling AlSaeed, Abdulelah (Abdulelah Ibrahim) Jung-Hoon Chun. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Mechanical Engineering. Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. Cataloged from PDF version of thesis. Includes bibliographical references (p. 66). Historically, substrate breakage during the poling process has been responsible for a 2% yield loss for a contract manufacturer specializing in volume production of lead zirconate titatate (PZT) thin film devices. In this research, two major causes of poling breakage were identified. First, stresses along substrate edges make PZT substrates more susceptible to breakage if any sort of mechanical force is present. It was determined that these stresses were caused by differential strains due to incomplete metal layer coverage. Second, the electrical arcing that is frequently taking place during poling sends a mechanical shock wave through the substrate. Electrical arcing is caused by metal overspray during the sputtering process. Poling breakage was experimentally reduced by 70% by redesigning the shadow mask used during sputtering to eliminate any metal overspray. by Abdulelah Alsaeed. M.Eng. 2013-03-28T18:09:35Z 2013-03-28T18:09:35Z 2012 2012 Thesis http://hdl.handle.net/1721.1/78161 829681029 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 66 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering. AlSaeed, Abdulelah (Abdulelah Ibrahim) Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling |
| title | Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling |
| title_full | Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling |
| title_fullStr | Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling |
| title_full_unstemmed | Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling |
| title_short | Elimination of PZT thin film breakage caused by electric current arcing and intrinsic differential strains during poling |
| title_sort | elimination of pzt thin film breakage caused by electric current arcing and intrinsic differential strains during poling |
| topic | Mechanical Engineering. |
| url | http://hdl.handle.net/1721.1/78161 |
| work_keys_str_mv | AT alsaeedabdulelahabdulelahibrahim eliminationofpztthinfilmbreakagecausedbyelectriccurrentarcingandintrinsicdifferentialstrainsduringpoling AT alsaeedabdulelahabdulelahibrahim eliminationofleadzirconatetitatatethinfilmbreakagecausedbyelectriccurrentarcingandintrinsicdifferentialstrainsduringpoling |