Advanced modeling of planarization processes for integrated circuit fabrication

Advanced modeling of planarization processes for integrated circuit fabrication

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012.

Bibliographic Details
Main Author:	Fan, Wei, Ph. D. Massachusetts Institute of Technology
Other Authors:	Duane S. Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2013
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/78446

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