Chemical and physical methods of the templated direction of block copolymers
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2013
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/78469 |
| _version_ | 1811087708481650688 |
|---|---|
| author | Nicaise, Samuel M. (Samuel Mospens) |
| author2 | Karl K. Berggren. |
| author_facet | Karl K. Berggren. Nicaise, Samuel M. (Samuel Mospens) |
| author_sort | Nicaise, Samuel M. (Samuel Mospens) |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012. |
| first_indexed | 2024-09-23T13:50:46Z |
| format | Thesis |
| id | mit-1721.1/78469 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:50:46Z |
| publishDate | 2013 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/784692019-04-11T02:00:29Z Chemical and physical methods of the templated direction of block copolymers Nicaise, Samuel M. (Samuel Mospens) Karl K. Berggren. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012. Cataloged from PDF version of thesis. Includes bibliographical references. This thesis discusses the investigation of various aspects of templated self-assembly of block copolymer (BCP) thin films for nanofeature fabrication. Two chapters outline the research of a combined physical and chemical templating method with two BCPs. The method was not effective in templating poly(styrene-block-methyl methacrylate) (PS-b-PMMA) BCP because of limited template wettability. The method effectively templated poly(octofluro pentamethacrylate-block-hydroxystyrene) (OFPMA-b-HSM) BCP to fabricate orthogonally-directed lamellar microdomains and nanohole-mesh arrays. Chapter 4 discusses the achievement of a mean overlay accuracy of 52 nm and 0' for two electron-beam-based lithographic features as a result of an investigated overlay process. Lastly, the thesis reports the fabrication of a wide-range of nanofeatures - from two-dimensional and three dimensional nanoholes arrays to elliptical and cylindrical meshes - by the sacrificial-post templating method with poly(styreneblock- dimethylsiloxane) (PS-b-PDMS) BCP. by Samuel M. Nicaise. S.M. 2013-04-12T19:27:07Z 2013-04-12T19:27:07Z 2012 2012 Thesis http://hdl.handle.net/1721.1/78469 834089277 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 96 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Nicaise, Samuel M. (Samuel Mospens) Chemical and physical methods of the templated direction of block copolymers |
| title | Chemical and physical methods of the templated direction of block copolymers |
| title_full | Chemical and physical methods of the templated direction of block copolymers |
| title_fullStr | Chemical and physical methods of the templated direction of block copolymers |
| title_full_unstemmed | Chemical and physical methods of the templated direction of block copolymers |
| title_short | Chemical and physical methods of the templated direction of block copolymers |
| title_sort | chemical and physical methods of the templated direction of block copolymers |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/78469 |
| work_keys_str_mv | AT nicaisesamuelmsamuelmospens chemicalandphysicalmethodsofthetemplateddirectionofblockcopolymers |