White-light scanning interferometer for absolute nano-scale gap thickness measurement
A special configuration of white-light scanning interferometer is described for measuring the absolute air gap thickness between two planar plates brought into close proximity. The measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Optical Society of America
2013
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| Online Access: | http://hdl.handle.net/1721.1/79715 |
| _version_ | 1826211998566711296 |
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| author | Xu, Zhiguang Youcef-toumi, Kamal Yoon, Soon Fatt Shilpiekandula, Vijay, 1979- |
| author2 | Massachusetts Institute of Technology. Department of Mechanical Engineering |
| author_facet | Massachusetts Institute of Technology. Department of Mechanical Engineering Xu, Zhiguang Youcef-toumi, Kamal Yoon, Soon Fatt Shilpiekandula, Vijay, 1979- |
| author_sort | Xu, Zhiguang |
| collection | MIT |
| description | A special configuration of white-light scanning interferometer is described for measuring the absolute air gap thickness between two planar plates brought into close proximity. The measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator of the light source. Compared with the common white-light interferometer our approach avoids the influence of the chromatic dispersion of the planar plates on the gap thickness quantification. It covers a large measurement range of from approximate contact to tens of microns with a high resolution of 0.1 nm. Detailed analytical models are presented and signal-processing algorithms based on convolution and correlation techniques are developed. Practical measurements are carried out and the experimental results match well with the analysis and simulation. Short-time and long-time repeatabilities are both tested to prove the high performance of our method. |
| first_indexed | 2024-09-23T15:14:25Z |
| format | Article |
| id | mit-1721.1/79715 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T15:14:25Z |
| publishDate | 2013 |
| publisher | Optical Society of America |
| record_format | dspace |
| spelling | mit-1721.1/797152022-09-29T13:35:33Z White-light scanning interferometer for absolute nano-scale gap thickness measurement Xu, Zhiguang Youcef-toumi, Kamal Yoon, Soon Fatt Shilpiekandula, Vijay, 1979- Massachusetts Institute of Technology. Department of Mechanical Engineering Singapore-MIT Alliance in Research and Technology (SMART) Xu, Zhiguang Shilpiekandula, Vijay Youcef-Toumi, Kamal A special configuration of white-light scanning interferometer is described for measuring the absolute air gap thickness between two planar plates brought into close proximity. The measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator of the light source. Compared with the common white-light interferometer our approach avoids the influence of the chromatic dispersion of the planar plates on the gap thickness quantification. It covers a large measurement range of from approximate contact to tens of microns with a high resolution of 0.1 nm. Detailed analytical models are presented and signal-processing algorithms based on convolution and correlation techniques are developed. Practical measurements are carried out and the experimental results match well with the analysis and simulation. Short-time and long-time repeatabilities are both tested to prove the high performance of our method. Singapore-MIT Alliance 2013-07-26T16:31:58Z 2013-07-26T16:31:58Z 2009-08 2009-06 Article http://purl.org/eprint/type/JournalArticle 1094-4087 http://hdl.handle.net/1721.1/79715 Xu, Zhiguang, Vijay Shilpiekandula, Kamal Youcef-toumi, and Soon Fatt Yoon. White-light Scanning Interferometer for Absolute Nano-scale Gap Thickness Measurement. Optics Express 17, no. 17 (August 11, 2009): 15104. © 2009 Optical Society of America en_US http://dx.doi.org/10.1364/OE.17.015104 Optics Express Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Optical Society of America Other University Web Domain |
| spellingShingle | Xu, Zhiguang Youcef-toumi, Kamal Yoon, Soon Fatt Shilpiekandula, Vijay, 1979- White-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title | White-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_full | White-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_fullStr | White-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_full_unstemmed | White-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_short | White-light scanning interferometer for absolute nano-scale gap thickness measurement |
| title_sort | white light scanning interferometer for absolute nano scale gap thickness measurement |
| url | http://hdl.handle.net/1721.1/79715 |
| work_keys_str_mv | AT xuzhiguang whitelightscanninginterferometerforabsolutenanoscalegapthicknessmeasurement AT youceftoumikamal whitelightscanninginterferometerforabsolutenanoscalegapthicknessmeasurement AT yoonsoonfatt whitelightscanninginterferometerforabsolutenanoscalegapthicknessmeasurement AT shilpiekandulavijay1979 whitelightscanninginterferometerforabsolutenanoscalegapthicknessmeasurement |