Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators
We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5...
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| Format: | Article |
| Language: | en_US |
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Optical Society of America
2013
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| Online Access: | http://hdl.handle.net/1721.1/79737 https://orcid.org/0000-0002-0282-8309 https://orcid.org/0000-0002-3913-6189 |
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| author | Lin, Hongtao Li, Lan Zou, Yi Danto, Sylvain Musgraves, J. David Richardson, Kathleen Kozacik, Stephen Murakowski, Maciej Prather, Dennis Singh, Vivek Kimerling, Lionel C. Hu, Juejun Lin, Pao Tai Agarwal, Anuradha Murthy |
| author2 | MIT Materials Research Laboratory |
| author_facet | MIT Materials Research Laboratory Lin, Hongtao Li, Lan Zou, Yi Danto, Sylvain Musgraves, J. David Richardson, Kathleen Kozacik, Stephen Murakowski, Maciej Prather, Dennis Singh, Vivek Kimerling, Lionel C. Hu, Juejun Lin, Pao Tai Agarwal, Anuradha Murthy |
| author_sort | Lin, Hongtao |
| collection | MIT |
| description | We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits. |
| first_indexed | 2024-09-23T15:03:52Z |
| format | Article |
| id | mit-1721.1/79737 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T15:03:52Z |
| publishDate | 2013 |
| publisher | Optical Society of America |
| record_format | dspace |
| spelling | mit-1721.1/797372022-10-02T00:20:42Z Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators Lin, Hongtao Li, Lan Zou, Yi Danto, Sylvain Musgraves, J. David Richardson, Kathleen Kozacik, Stephen Murakowski, Maciej Prather, Dennis Singh, Vivek Kimerling, Lionel C. Hu, Juejun Lin, Pao Tai Agarwal, Anuradha Murthy MIT Materials Research Laboratory Massachusetts Institute of Technology. Department of Materials Science and Engineering Lin, Pao Tai Singh, Vivek Agarwal, Anuradha Murthy Kimerling, Lionel C. We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5.2 μm wavelength, which is among the highest values reported in on-chip mid-infrared (mid-IR) photonic devices. The resonator can serve as a key building block for mid-IR planar photonic circuits. National Science Foundation (U.S.). (Award 1200406) National Science Foundation (U.S.). (EPSCoR Grant EPS-0814251) United States. Dept. of Energy (Contract DE-NA000421) United States. National Nuclear Security Administration (Defense Nuclear Nonproliferation Research and Development) 2013-07-31T14:57:08Z 2013-07-31T14:57:08Z 2013-04 2013-03 Article http://purl.org/eprint/type/JournalArticle 0146-9592 1539-4794 http://hdl.handle.net/1721.1/79737 Lin, Hongtao et al. “Demonstration of high-Q Mid-infrared Chalcogenide Glass-on-silicon Resonators.” Optics Letters 38.9 (2013): 1470. © 2013 Optical Society of America https://orcid.org/0000-0002-0282-8309 https://orcid.org/0000-0002-3913-6189 en_US http://dx.doi.org/10.1364/OL.38.001470 Optics Letters Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Optical Society of America MIT web domain |
| spellingShingle | Lin, Hongtao Li, Lan Zou, Yi Danto, Sylvain Musgraves, J. David Richardson, Kathleen Kozacik, Stephen Murakowski, Maciej Prather, Dennis Singh, Vivek Kimerling, Lionel C. Hu, Juejun Lin, Pao Tai Agarwal, Anuradha Murthy Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators |
| title | Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators |
| title_full | Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators |
| title_fullStr | Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators |
| title_full_unstemmed | Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators |
| title_short | Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators |
| title_sort | demonstration of high q mid infrared chalcogenide glass on silicon resonators |
| url | http://hdl.handle.net/1721.1/79737 https://orcid.org/0000-0002-0282-8309 https://orcid.org/0000-0002-3913-6189 |
| work_keys_str_mv | AT linhongtao demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT lilan demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT zouyi demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT dantosylvain demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT musgravesjdavid demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT richardsonkathleen demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT kozacikstephen demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT murakowskimaciej demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT pratherdennis demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT singhvivek demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT kimerlinglionelc demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT hujuejun demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT linpaotai demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators AT agarwalanuradhamurthy demonstrationofhighqmidinfraredchalcogenideglassonsiliconresonators |