Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators

Demonstration of high-Q mid-infrared chalcogenide glass-on-silicon resonators

We demonstrated high-index-contrast, waveguide-coupled As[subscript 2]Se[subscript 3] chalcogenide glass resonators monolithically integrated on silicon fabricated using optical lithography and a lift-off process. The resonators exhibited a high intrinsic quality factor of 2 × 10[superscript 5] at 5...

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Bibliographic Details
Main Authors: Lin, Hongtao, Li, Lan, Zou, Yi, Danto, Sylvain, Musgraves, J. David, Richardson, Kathleen, Kozacik, Stephen, Murakowski, Maciej, Prather, Dennis, Singh, Vivek, Kimerling, Lionel C., Hu, Juejun, Lin, Pao Tai, Agarwal, Anuradha Murthy
Other Authors: MIT Materials Research Laboratory
Format: Article
Language:en_US
Published: Optical Society of America 2013
Online Access:http://hdl.handle.net/1721.1/79737
https://orcid.org/0000-0002-0282-8309
https://orcid.org/0000-0002-3913-6189

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