Monolithic III-V/Si Integration

We summarize our work on creating substrate platforms, processes, and devices for the monolithic integration of silicon CMOS circuits with III-V optical and electronic devices. Visible LEDs and InP HBTs have been integrated on silicon materials platforms that lend themselves to process integration w...

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Bibliographic Details
Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers (IEEE) 2013
Online Access:http://hdl.handle.net/1721.1/80884