Monolithic III-V/Si Integration
We summarize our work on creating substrate platforms, processes, and devices for the monolithic integration of silicon CMOS circuits with III-V optical and electronic devices. Visible LEDs and InP HBTs have been integrated on silicon materials platforms that lend themselves to process integration w...
Other Authors: | Massachusetts Institute of Technology. Department of Materials Science and Engineering |
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Format: | Article |
Language: | en_US |
Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2013
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Online Access: | http://hdl.handle.net/1721.1/80884 |
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