Transparent amorphous silicon channel waveguides and high-Q resonators using a damascene process
We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen e...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Optical Society of America
2013
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| Online Access: | http://hdl.handle.net/1721.1/81305 https://orcid.org/0000-0002-3913-6189 |
| Summary: | We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen encapsulation for process integration of a-Si waveguide cores. At 1550 nm , the average measured transmission loss coefficient is 2.5±0.1 dB/cm for the TE mode, comparable with high-quality single crystalline silicon counterparts. The racetrack resonators have mid- 10[superscript 4] to 10[superscript 5] quality factors (Q) and extinction ratios as high as 25 dB . |
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