A comparative study of metrology techniques for porous organic thin films

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.

Bibliographic Details
Main Author: Lam, Yee, 1979-
Other Authors: Eugene A. Fitzgerald.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/8459
Description
Summary:Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.