A comparative study of metrology techniques for porous organic thin films
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.
Main Author: | Lam, Yee, 1979- |
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Other Authors: | Eugene A. Fitzgerald. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/8459 |
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