A dual-laser interferometry system for thin film measurements in thermal vapor deposition applications

A dual-laser interferometry system for thin film measurements in thermal vapor deposition applications

Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2012.

Bibliographic Details
Main Author: Yin, Allen Shiping
Other Authors: Marc A. Baldo.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/85231

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