Screening experiment for a polysilicon gate etch chamber
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/85325 |
| _version_ | 1826203530524884992 |
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| author | Levis, Kim-Marie, 1976- |
| author2 | Gerald Benard and Klavs F. Jensen. |
| author_facet | Gerald Benard and Klavs F. Jensen. Levis, Kim-Marie, 1976- |
| author_sort | Levis, Kim-Marie, 1976- |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999. |
| first_indexed | 2024-09-23T12:38:48Z |
| format | Thesis |
| id | mit-1721.1/85325 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T12:38:48Z |
| publishDate | 2014 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/853252019-04-11T10:47:49Z Screening experiment for a polysilicon gate etch chamber Levis, Kim-Marie, 1976- Gerald Benard and Klavs F. Jensen. Massachusetts Institute of Technology. Department of Materials Science and Engineering. Massachusetts Institute of Technology. Department of Materials Science and Engineering. Materials Science and Engineering. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999. Includes bibliographical references (leaf 53). by Kim-Marie Levis. S.M. 2014-03-06T15:33:47Z 2014-03-06T15:33:47Z 1999 1999 Thesis http://hdl.handle.net/1721.1/85325 43936916 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 57 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering. Levis, Kim-Marie, 1976- Screening experiment for a polysilicon gate etch chamber |
| title | Screening experiment for a polysilicon gate etch chamber |
| title_full | Screening experiment for a polysilicon gate etch chamber |
| title_fullStr | Screening experiment for a polysilicon gate etch chamber |
| title_full_unstemmed | Screening experiment for a polysilicon gate etch chamber |
| title_short | Screening experiment for a polysilicon gate etch chamber |
| title_sort | screening experiment for a polysilicon gate etch chamber |
| topic | Materials Science and Engineering. |
| url | http://hdl.handle.net/1721.1/85325 |
| work_keys_str_mv | AT leviskimmarie1976 screeningexperimentforapolysilicongateetchchamber |