Screening experiment for a polysilicon gate etch chamber

Screening experiment for a polysilicon gate etch chamber

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.

Bibliographic Details
Main Author:	Levis, Kim-Marie, 1976-
Other Authors:	Gerald Benard and Klavs F. Jensen.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/85325

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