Dielectric sensing of silicon accelerometers

Dielectric sensing of silicon accelerometers

Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2013.

Bibliographic Details
Main Author:	Kroese, Bethany Ruth
Other Authors:	Dana Weinstein.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/85433

Similar Items

Analysis/development of a crash sensing algorithm using multiple accelerometers
by: Tsai, Fon-Jui
Published: (2009)

Sensing interface for high-resolution accelerometers
by: Zhang, Xiaoling
Published: (2008)

A micromechanical silicon oscillating accelerometer
by: Gibbons, Kevin A. (Kevin Augustine)
Published: (2008)

Design and modeling of silicon MEMS accelerometer
by: Hrairi, Meftah, et al.
Published: (2011)

Design and modelling of silicon MEMS accelerometer
by: Hrairi, Meftah, et al.
Published: (2013)

Design and fabrication of an optical accelerometer using silicon micro-machining
by: Chiu, Man Ming.
Published: (2008)

Force multiplier in a microelectromechanical silicon oscillating accelerometer
by: St. Michel, Nathan A. (Nathan Alan), 1975-
Published: (2006)

A high precision fully integrated accelerometer
by: Ashburn, Michael Anthony
Published: (2008)

Amplitude and frequency demodulation controller for MEMS accelerometer
by: Brooks, Lane Gearle, 1975-
Published: (2005)

Using an accelerometer sensor to measure human hand motion
by: Graham, Brian Barkley, 1977-
Published: (2014)

Active sensing in silicon-based MEMS resonators
by: Marathe, Radhika (Radhika Atul)
Published: (2015)

Development of an angular accelerometer
by: Silvey, John O
Published: (2010)

Readout and control optimization for a high performance MEMS accelerometer
by: Homer, Nick (Nick Craig), 1978-
Published: (2014)

Thermally-actuated piezoresistively-sensed mechanical silicon oscillator
by: Sundaram, Subramanian, Ph. D. Massachusetts Institute of Technology
Published: (2014)

Design of a low power capacitive sensor for a micromachined accelerometer
by: Good, Daniel (Daniel Albert), 1979-
Published: (2005)

High resolution readout of vibrating island accelerometer using digital receiver
by: Chang, Lawrence Kon-Luen, 1975-
Published: (2010)

Design and implementation of a preload electronics architecture for a MEMS accelerometer
by: Lin, Alvin Lai
Published: (2011)

Out-of-plane Characterization of Silicon-on-insulator Multiuser MEMS Processes-based Tri-axis Accelerometer
by: L., Sujatha, et al.
Published: (2016)

The integration of InP /InGaAsP ridge waveguide structures with dielectric waveguides on silicon
by: Barkley, Edward R. (Edward Robert)
Published: (2007)

Simple package for resistive-pulse sensing with a silicon pore
by: Young, Derek Park-Shing, 1976-
Published: (2014)

Optical and dielectric properties of nanosolid silicon
by: Pan, Likun
Published: (2008)

Automated content sizing using accelerometer
by: Ng, Yun Hao
Published: (2014)

An electronic accelerometer
by: Mueller, Richard A.
Published: (2022)

Signal-conditioning interface for accelerometer
by: Chan, Pak Kwong.
Published: (2008)

An on-chip opto-mechanical accelerometer
by: Dong, Bin, et al.
Published: (2013)

Location tracking using magnetometers and accelerometers
by: Kwek, Jun Heng
Published: (2021)

Accelerometer based motion activity recognition
by: Guo, Kaitong
Published: (2018)

A silicon current sensing amplifier and organic imager for an optical feedback OLED display
by: Lin, Albert, M. Eng. Massachusetts Institute of Technology
Published: (2007)

Electrical studies of silicon and low K dielectric material
by: Ahn, Sang Hoon, 1970-
Published: (2005)

Location tracking using accelerometers and magnetometers
by: Haw, Niccholas Le Jae
Published: (2019)

A signal-conditioning chip for accelerometer applications
by: Lee, Wing Foon
Published: (2008)

Silicone dielectric elastomer actuator in oil immersion
by: Pham, Minh Thao.
Published: (2013)

Carbon doped silicon oxides for low k dielectric applications in multilevel interconnects
by: Liu, Bo
Published: (2008)

Design and characterization of miniaturized accelerometers
by: Sing, Swee Leong.
Published: (2012)

Deep Activity Recognition Models with Triaxial Accelerometers
by: Abu Alsheikh, Mohammad, et al.
Published: (2017)

A low-power accelerometer IC with high sensitivity
by: Wang, Yan Mei
Published: (2015)

Wing loads as determined by the accelerometer
by: Doolittle, James Harold, 1896-1993.
Published: (2009)

Electrification by liquid dielectric flow
by: Gasworth, Steven Marc
Published: (2005)

Electrical characterization of dielectrically isolated silicon substrates containing buried metallic layers
by: Goh, Wang Ling, et al.
Published: (2009)

Electrical study of molybdenum in silicon and fluorinated SiO₂ for interlayer dielectrics
by: Cagas, Jean (Cagas Quijano, Jean Allison), 1977-
Published: (2005)