A MEMS valve for the MIT Microengine

A MEMS valve for the MIT Microengine

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.

Bibliographic Details
Main Author: Yang, Xue'en, 1975-
Other Authors: Martin A. Schmidt.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/8548

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