A machine for tribological experimentation on indexing continuous media with specific application to semiconductor testing
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.
Main Author: | Sprunt, Alexander D. (Alexander Dalziel), 1977- |
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Other Authors: | Alexander H. Slocum. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/8555 |
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