Enhancing MEMS design using statistical process information

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.

ग्रंथसूची विवरण
मुख्य लेखक: Moyne, William P. (William Patrick)
अन्य लेखक: Duane S. Boning and Donald E. Troxel.
स्वरूप: थीसिस
भाषा:eng
प्रकाशित: Massachusetts Institute of Technology 2014
विषय:
ऑनलाइन पहुंच:http://hdl.handle.net/1721.1/85725
विवरण
सारांश:Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.