Enhancing MEMS design using statistical process information

Enhancing MEMS design using statistical process information

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.

Bibliographic Details
Main Author: Moyne, William P. (William Patrick)
Other Authors: Duane S. Boning and Donald E. Troxel.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/85725

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