3D MEMS via (post-) buckling of micromachined structures and integration of bulk nanoporous elements in microfluidic devices

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Aeronautics and Astronautics, 2011.

Bibliographic Details
Main Author:	Fachin, Fabio
Other Authors:	Brian L. Wardle.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2014
Subjects:	Aeronautics and Astronautics.
Online Access:	http://hdl.handle.net/1721.1/85759

Internet

http://hdl.handle.net/1721.1/85759