3D MEMS via (post-) buckling of micromachined structures and integration of bulk nanoporous elements in microfluidic devices

3D MEMS via (post-) buckling of micromachined structures and integration of bulk nanoporous elements in microfluidic devices

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Aeronautics and Astronautics, 2011.

Bibliographic Details
Main Author: Fachin, Fabio
Other Authors: Brian L. Wardle.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Aeronautics and Astronautics.
Online Access:http://hdl.handle.net/1721.1/85759

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