All graphene electromechanical switch fabricated by chemical vapor deposition

We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film by application of approximately 5 V between the layers. Contact is broken by...

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Main Authors: Milaninia, Kaveh M., Baldo, Marc A., Reina, Alfonso, Kong, Jing
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: American Institute of Physics (AIP) 2014
Online Access:http://hdl.handle.net/1721.1/85955
https://orcid.org/0000-0003-0551-1208
https://orcid.org/0000-0003-2201-5257
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author Milaninia, Kaveh M.
Baldo, Marc A.
Reina, Alfonso
Kong, Jing
author2 Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
author_facet Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Milaninia, Kaveh M.
Baldo, Marc A.
Reina, Alfonso
Kong, Jing
author_sort Milaninia, Kaveh M.
collection MIT
description We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film by application of approximately 5 V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of switching at low voltage confirms that graphene is an attractive material for electromechanical switches. Reliability may be improved by scaling the device area to within one crystalline domain of the graphene films.
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spelling mit-1721.1/859552022-10-01T05:54:10Z All graphene electromechanical switch fabricated by chemical vapor deposition Milaninia, Kaveh M. Baldo, Marc A. Reina, Alfonso Kong, Jing Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Department of Materials Science and Engineering Milaninia, Kaveh M. Baldo, Marc A. Reina, Alfonso Kong, Jing We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film by application of approximately 5 V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of switching at low voltage confirms that graphene is an attractive material for electromechanical switches. Reliability may be improved by scaling the device area to within one crystalline domain of the graphene films. United States. Defense Advanced Research Projects Agency (Grant N66001-08-1-2002) Microelectronics Advanced Research Corporation (MARCO). Interconnect Focus Center 2014-03-28T16:31:35Z 2014-03-28T16:31:35Z 2009-11 2009-09 Article http://purl.org/eprint/type/JournalArticle 00036951 http://hdl.handle.net/1721.1/85955 Milaninia, Kaveh M., Marc A. Baldo, Alfonso Reina, and Jing Kong. “All Graphene Electromechanical Switch Fabricated by Chemical Vapor Deposition.” Appl. Phys. Lett. 95, no. 18 (2009): 183105. © 2009 American Institute of Physics https://orcid.org/0000-0003-0551-1208 https://orcid.org/0000-0003-2201-5257 en_US http://dx.doi.org/10.1063/1.3259415 Applied Physics Letters Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf American Institute of Physics (AIP) MIT web domain
spellingShingle Milaninia, Kaveh M.
Baldo, Marc A.
Reina, Alfonso
Kong, Jing
All graphene electromechanical switch fabricated by chemical vapor deposition
title All graphene electromechanical switch fabricated by chemical vapor deposition
title_full All graphene electromechanical switch fabricated by chemical vapor deposition
title_fullStr All graphene electromechanical switch fabricated by chemical vapor deposition
title_full_unstemmed All graphene electromechanical switch fabricated by chemical vapor deposition
title_short All graphene electromechanical switch fabricated by chemical vapor deposition
title_sort all graphene electromechanical switch fabricated by chemical vapor deposition
url http://hdl.handle.net/1721.1/85955
https://orcid.org/0000-0003-0551-1208
https://orcid.org/0000-0003-2201-5257
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