Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion

We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the...

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Main Authors: Duan, Huigao, Berggren, Karl K.
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: American Chemical Society (ACS) 2014
Online Access:http://hdl.handle.net/1721.1/85959
https://orcid.org/0000-0001-7453-9031
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author Duan, Huigao
Berggren, Karl K.
author2 Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
author_facet Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Duan, Huigao
Berggren, Karl K.
author_sort Duan, Huigao
collection MIT
description We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication of nanodevices, nanopatterning, and fluid-flow investigations.
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spelling mit-1721.1/859592022-10-01T02:23:55Z Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion Duan, Huigao Berggren, Karl K. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Duan, Huigao Berggren, Karl K. We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication of nanodevices, nanopatterning, and fluid-flow investigations. United States. Office of Naval Research Semiconductor Research Corporation. Nanoscale Research Initiative 2014-03-28T17:13:51Z 2014-03-28T17:13:51Z 2010-08 2010-06 Article http://purl.org/eprint/type/JournalArticle 1530-6984 1530-6992 http://hdl.handle.net/1721.1/85959 Duan, Huigao, and Karl K. Berggren. “Directed Self-Assembly at the 10 Nm Scale by Using Capillary Force-Induced Nanocohesion.” Nano Lett. 10, no. 9 (September 8, 2010): 3710–3716. https://orcid.org/0000-0001-7453-9031 en_US http://dx.doi.org/10.1021/nl102259s Nano Letters Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf American Chemical Society (ACS) MIT web domain
spellingShingle Duan, Huigao
Berggren, Karl K.
Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
title Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
title_full Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
title_fullStr Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
title_full_unstemmed Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
title_short Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
title_sort directed self assembly at the 10 nm scale by using capillary force induced nanocohesion
url http://hdl.handle.net/1721.1/85959
https://orcid.org/0000-0001-7453-9031
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