Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the...
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American Chemical Society (ACS)
2014
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Online Access: | http://hdl.handle.net/1721.1/85959 https://orcid.org/0000-0001-7453-9031 |
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author | Duan, Huigao Berggren, Karl K. |
author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Duan, Huigao Berggren, Karl K. |
author_sort | Duan, Huigao |
collection | MIT |
description | We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication of nanodevices, nanopatterning, and fluid-flow investigations. |
first_indexed | 2024-09-23T11:15:37Z |
format | Article |
id | mit-1721.1/85959 |
institution | Massachusetts Institute of Technology |
language | en_US |
last_indexed | 2024-09-23T11:15:37Z |
publishDate | 2014 |
publisher | American Chemical Society (ACS) |
record_format | dspace |
spelling | mit-1721.1/859592022-10-01T02:23:55Z Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion Duan, Huigao Berggren, Karl K. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Duan, Huigao Berggren, Karl K. We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication of nanodevices, nanopatterning, and fluid-flow investigations. United States. Office of Naval Research Semiconductor Research Corporation. Nanoscale Research Initiative 2014-03-28T17:13:51Z 2014-03-28T17:13:51Z 2010-08 2010-06 Article http://purl.org/eprint/type/JournalArticle 1530-6984 1530-6992 http://hdl.handle.net/1721.1/85959 Duan, Huigao, and Karl K. Berggren. “Directed Self-Assembly at the 10 Nm Scale by Using Capillary Force-Induced Nanocohesion.” Nano Lett. 10, no. 9 (September 8, 2010): 3710–3716. https://orcid.org/0000-0001-7453-9031 en_US http://dx.doi.org/10.1021/nl102259s Nano Letters Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf American Chemical Society (ACS) MIT web domain |
spellingShingle | Duan, Huigao Berggren, Karl K. Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion |
title | Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion |
title_full | Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion |
title_fullStr | Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion |
title_full_unstemmed | Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion |
title_short | Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion |
title_sort | directed self assembly at the 10 nm scale by using capillary force induced nanocohesion |
url | http://hdl.handle.net/1721.1/85959 https://orcid.org/0000-0001-7453-9031 |
work_keys_str_mv | AT duanhuigao directedselfassemblyatthe10nmscalebyusingcapillaryforceinducednanocohesion AT berggrenkarlk directedselfassemblyatthe10nmscalebyusingcapillaryforceinducednanocohesion |