Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion

Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion

We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the...

Szczegółowa specyfikacja

Opis bibliograficzny
Główni autorzy:	Duan, Huigao, Berggren, Karl K.
Kolejni autorzy:	Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format:	Artykuł
Język:	en_US
Wydane:	American Chemical Society (ACS) 2014
Dostęp online:	http://hdl.handle.net/1721.1/85959 https://orcid.org/0000-0001-7453-9031

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