Zone Plate Array Lithography (ZPAL) : simulations and system design
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/86545 |
| _version_ | 1826211011644882944 |
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| author | Menon, Rajesh, 1976- |
| author2 | Henry I. Smith. |
| author_facet | Henry I. Smith. Menon, Rajesh, 1976- |
| author_sort | Menon, Rajesh, 1976- |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000. |
| first_indexed | 2024-09-23T14:59:26Z |
| format | Thesis |
| id | mit-1721.1/86545 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:59:26Z |
| publishDate | 2014 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/865452019-04-12T16:02:33Z Zone Plate Array Lithography (ZPAL) : simulations and system design ZPAL Menon, Rajesh, 1976- Henry I. Smith. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000. Includes bibliographical references (p. 105-109). by Rajesh Menon. S.M. 2014-05-07T16:48:28Z 2014-05-07T16:48:28Z 2000 2000 Thesis http://hdl.handle.net/1721.1/86545 46922291 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 109 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Menon, Rajesh, 1976- Zone Plate Array Lithography (ZPAL) : simulations and system design |
| title | Zone Plate Array Lithography (ZPAL) : simulations and system design |
| title_full | Zone Plate Array Lithography (ZPAL) : simulations and system design |
| title_fullStr | Zone Plate Array Lithography (ZPAL) : simulations and system design |
| title_full_unstemmed | Zone Plate Array Lithography (ZPAL) : simulations and system design |
| title_short | Zone Plate Array Lithography (ZPAL) : simulations and system design |
| title_sort | zone plate array lithography zpal simulations and system design |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/86545 |
| work_keys_str_mv | AT menonrajesh1976 zoneplatearraylithographyzpalsimulationsandsystemdesign AT menonrajesh1976 zpal |