Modeling and analysis of extrusion-spin coating : an efficient and deterministic photoresist coating method in microlithography

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.

Bibliographic Details
Main Author:	Han, Sangjun, 1972-
Other Authors:	Jung-Hoon Chun.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/8694

Internet

http://hdl.handle.net/1721.1/8694