Device independent process control of dielectric chemical mechanical polishing

Device independent process control of dielectric chemical mechanical polishing

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2000.

Bibliographic Details
Main Author: Smith, Taber H. (Taber Hardesty)
Other Authors: Duane S. Boning.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/87156
Description
Summary:Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, February 2000.

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