Fabrication of a planar optical add/drop channel filter in silicon oxynitride

Fabrication of a planar optical add/drop channel filter in silicon oxynitride

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.

Bibliographic Details
Main Author: Huang, Joseph C. (Joseph Chow), 1977-
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/87205
Description
Summary:Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.

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