Fabrication of a planar optical add/drop channel filter in silicon oxynitride
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.
Main Author: | Huang, Joseph C. (Joseph Chow), 1977- |
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Other Authors: | Henry I. Smith. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2014
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/87205 |
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