Fabrication of ultra-thin strained silicon on insulator

Fabrication of ultra-thin strained silicon on insulator

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Bibliographic Details
Main Author: Drake, Tonya S. (Tonya Sue), 1978-
Other Authors: Judy L. Hoyt.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/87350

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