Design principles for high performance, low environmental impact silicon cleans

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2001.

Bibliographic Details
Main Author:	Reddy, Anand Junuthula, 1973-
Other Authors:	Lionel C. Kimerling.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/8767

Internet

http://hdl.handle.net/1721.1/8767