Design principles for high performance, low environmental impact silicon cleans

Design principles for high performance, low environmental impact silicon cleans

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2001.

Bibliographic Details
Main Author: Reddy, Anand Junuthula, 1973-
Other Authors: Lionel C. Kimerling.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering.
Online Access:http://hdl.handle.net/1721.1/8767

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