Assembling 3D MEMS structures by folding, aligning and latching 2D patterned films

Assembling 3D MEMS structures by folding, aligning and latching 2D patterned films

Thesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2014.

Bibliographic Details
Main Author: Shaar, Nader S. (Nader Salah)
Other Authors: George Barbastathis and Carol Livermore.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/87983

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