High-resolution micromachined interferometric accelerometer
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2014
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/89324 |
| _version_ | 1826208139544887296 |
|---|---|
| author | Loh, Nin C. (Nin Chin), 1977- |
| author2 | George Barbastathis. |
| author_facet | George Barbastathis. Loh, Nin C. (Nin Chin), 1977- |
| author_sort | Loh, Nin C. (Nin Chin), 1977- |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001. |
| first_indexed | 2024-09-23T14:01:06Z |
| format | Thesis |
| id | mit-1721.1/89324 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T14:01:06Z |
| publishDate | 2014 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/893242019-04-12T15:28:09Z High-resolution micromachined interferometric accelerometer Loh, Nin C. (Nin Chin), 1977- George Barbastathis. Massachusetts Institute of Technology. Department of Mechanical Engineering. Massachusetts Institute of Technology. Department of Mechanical Engineering. Mechanical Engineering. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001. Includes bibliographical references (p. 74-75). by Nin C. Loh. S.M. 2014-09-09T17:54:10Z 2014-09-09T17:54:10Z 2001 2001 Thesis http://hdl.handle.net/1721.1/89324 49039158 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 75 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering. Loh, Nin C. (Nin Chin), 1977- High-resolution micromachined interferometric accelerometer |
| title | High-resolution micromachined interferometric accelerometer |
| title_full | High-resolution micromachined interferometric accelerometer |
| title_fullStr | High-resolution micromachined interferometric accelerometer |
| title_full_unstemmed | High-resolution micromachined interferometric accelerometer |
| title_short | High-resolution micromachined interferometric accelerometer |
| title_sort | high resolution micromachined interferometric accelerometer |
| topic | Mechanical Engineering. |
| url | http://hdl.handle.net/1721.1/89324 |
| work_keys_str_mv | AT lohnincninchin1977 highresolutionmicromachinedinterferometricaccelerometer |