High-resolution micromachined interferometric accelerometer

High-resolution micromachined interferometric accelerometer

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001.

Bibliographic Details
Main Author: Loh, Nin C. (Nin Chin), 1977-
Other Authors: George Barbastathis.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/89324

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