Precision passive alignment of wafers
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2014
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| Online Access: | http://hdl.handle.net/1721.1/89364 |
| _version_ | 1811077856007028736 |
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| author | Weber, Alexis Christian, 1974- |
| author2 | Alexander H. Slocum. |
| author_facet | Alexander H. Slocum. Weber, Alexis Christian, 1974- |
| author_sort | Weber, Alexis Christian, 1974- |
| collection | MIT |
| description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002. |
| first_indexed | 2024-09-23T10:49:21Z |
| format | Thesis |
| id | mit-1721.1/89364 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T10:49:21Z |
| publishDate | 2014 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/893642019-04-12T11:19:40Z Precision passive alignment of wafers Weber, Alexis Christian, 1974- Alexander H. Slocum. Massachusetts Institute of Technology. Department of Mechanical Engineering. Massachusetts Institute of Technology. Department of Mechanical Engineering. Mechanical Engineering. Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002. Includes bibliographical references (p. 73-75). by Alexis Christian Weber. S.M. 2014-09-09T17:56:51Z 2014-09-09T17:56:51Z 2002 2002 Thesis http://hdl.handle.net/1721.1/89364 51830267 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 102 p. application/pdf Massachusetts Institute of Technology |
| spellingShingle | Mechanical Engineering. Weber, Alexis Christian, 1974- Precision passive alignment of wafers |
| title | Precision passive alignment of wafers |
| title_full | Precision passive alignment of wafers |
| title_fullStr | Precision passive alignment of wafers |
| title_full_unstemmed | Precision passive alignment of wafers |
| title_short | Precision passive alignment of wafers |
| title_sort | precision passive alignment of wafers |
| topic | Mechanical Engineering. |
| url | http://hdl.handle.net/1721.1/89364 |
| work_keys_str_mv | AT weberalexischristian1974 precisionpassivealignmentofwafers |