MEMS amplification of piezoelectric strain for in-plane actuation

MEMS amplification of piezoelectric strain for in-plane actuation

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Bibliographic Details
Main Author: Conway, Nicholas J. (Nicholas James), 1979-
Other Authors: Sang-Gook Kim.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/89382

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