Design and fabrication of a high precision wafer polishing machine

Design and fabrication of a high precision wafer polishing machine

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.

Bibliographic Details
Main Author: Torkaman, Amir (Amir Hesam), 1979-
Other Authors: Ernesto Blanco.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/9015

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