Tolerance analysis for efficient MMI devices in silicon photonics
Silicon is considered a promising platform for photonic integrated circuits as they can be fabricated in state-of-the-art electronics foundaries with integrated CMOS electronics. While much of the existing work on CMOS photonics has used directional couplers for power splitting, multimode interferen...
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| Format: | Article |
| Language: | en_US |
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Society of Photo-optical Instrumentation Engineers
2014
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| Online Access: | http://hdl.handle.net/1721.1/90589 https://orcid.org/0000-0002-7635-8266 https://orcid.org/0000-0003-0420-2235 |
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| author | Vázquez, Carmen Tapetado, Alberto Orcutt, Jason Scott Meng, Huaiyu Ram, Rajeev J. Vazquez, Carmen |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Vázquez, Carmen Tapetado, Alberto Orcutt, Jason Scott Meng, Huaiyu Ram, Rajeev J. Vazquez, Carmen |
| author_sort | Vázquez, Carmen |
| collection | MIT |
| description | Silicon is considered a promising platform for photonic integrated circuits as they can be fabricated in state-of-the-art electronics foundaries with integrated CMOS electronics. While much of the existing work on CMOS photonics has used directional couplers for power splitting, multimode interference (MMI) devices may have relaxed fabrication requirements and smaller footprints, potentially energy efficient designs. They have already been used as 1x2 splitters, 2x1 combiners in Quadrature Phase Shift Keying modulators, and 3-dB couplers among others. In this work, 3-dB, butterfly and cross MMI couplers are realized on bulk CMOS technology. Footprints from around 40um2 to 200 um2 are obtained. MMI tolerances to manufacturing process and bandwidth are analyzed and tested showing the robustness of the MMI devices. |
| first_indexed | 2024-09-23T11:19:00Z |
| format | Article |
| id | mit-1721.1/90589 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T11:19:00Z |
| publishDate | 2014 |
| publisher | Society of Photo-optical Instrumentation Engineers |
| record_format | dspace |
| spelling | mit-1721.1/905892022-10-01T02:44:51Z Tolerance analysis for efficient MMI devices in silicon photonics Vázquez, Carmen Tapetado, Alberto Orcutt, Jason Scott Meng, Huaiyu Ram, Rajeev J. Vazquez, Carmen Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Research Laboratory of Electronics Meng, Huaiyu Ram, Rajeev J. Orcutt, Jason Scott Vazquez, Carmen Tapetado, Alberto Silicon is considered a promising platform for photonic integrated circuits as they can be fabricated in state-of-the-art electronics foundaries with integrated CMOS electronics. While much of the existing work on CMOS photonics has used directional couplers for power splitting, multimode interference (MMI) devices may have relaxed fabrication requirements and smaller footprints, potentially energy efficient designs. They have already been used as 1x2 splitters, 2x1 combiners in Quadrature Phase Shift Keying modulators, and 3-dB couplers among others. In this work, 3-dB, butterfly and cross MMI couplers are realized on bulk CMOS technology. Footprints from around 40um2 to 200 um2 are obtained. MMI tolerances to manufacturing process and bandwidth are analyzed and tested showing the robustness of the MMI devices. Fundación Caja Madrid Spain. Ministerio de Economía y Competitividad (project TEC2012-37983-C03-02) Spain. Ministerio de Economía y Competitividad (grant EEBB- 1-13-07511) Spain. Ministerio de Educación y Ciencia (grant PRX12/00007) 2014-10-07T17:51:07Z 2014-10-07T17:51:07Z 2014-03 Article http://purl.org/eprint/type/ConferencePaper 0277-786X http://hdl.handle.net/1721.1/90589 Vázquez, Carmen, Alberto Tapetado, Jason Orcutt, Huaiyu Charles Meng, and Rajeev Ram. “Tolerance Analysis for Efficient MMI Devices in Silicon Photonics.” Edited by Joel Kubby and Graham T. Reed. Silicon Photonics IX (March 8, 2014). (Proc. SPIE 8990). https://orcid.org/0000-0002-7635-8266 https://orcid.org/0000-0003-0420-2235 en_US http://dx.doi.org/10.1117/12.2039730 Silicon photonics IX Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Society of Photo-optical Instrumentation Engineers |
| spellingShingle | Vázquez, Carmen Tapetado, Alberto Orcutt, Jason Scott Meng, Huaiyu Ram, Rajeev J. Vazquez, Carmen Tolerance analysis for efficient MMI devices in silicon photonics |
| title | Tolerance analysis for efficient MMI devices in silicon photonics |
| title_full | Tolerance analysis for efficient MMI devices in silicon photonics |
| title_fullStr | Tolerance analysis for efficient MMI devices in silicon photonics |
| title_full_unstemmed | Tolerance analysis for efficient MMI devices in silicon photonics |
| title_short | Tolerance analysis for efficient MMI devices in silicon photonics |
| title_sort | tolerance analysis for efficient mmi devices in silicon photonics |
| url | http://hdl.handle.net/1721.1/90589 https://orcid.org/0000-0002-7635-8266 https://orcid.org/0000-0003-0420-2235 |
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