Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators
This work presents a new switching mechanism in piezoelectric transduction of AlGaN/GaN bulk acoustic resonators. A piezoelectric transducer is formed in the AlGaN, between a top Schottky electrode and a 2D electron gas (2DEG) as a second electrode. In the off state, this 2DEG can be depleted by app...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
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Institute of Electrical and Electronics Engineers (IEEE)
2014
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| Online Access: | http://hdl.handle.net/1721.1/91021 |
| _version_ | 1811086496163168256 |
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| author | Weinstein, Dana Popa, Laura Cornelia |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Weinstein, Dana Popa, Laura Cornelia |
| author_sort | Weinstein, Dana |
| collection | MIT |
| description | This work presents a new switching mechanism in piezoelectric transduction of AlGaN/GaN bulk acoustic resonators. A piezoelectric transducer is formed in the AlGaN, between a top Schottky electrode and a 2D electron gas (2DEG) as a second electrode. In the off state, this 2DEG can be depleted by applying a negative bias to the top electrode, suppressing transduction and reducing capacitive loading. Switchable AlGaN/GaN resonators are demonstrated from 240MHz to 3.5GHz with frequency-quality factor products up to 1.7×10[superscript 12] in air. Switching is shown in both devices with passive piezoelectric and HEMT sensing, with >19dB suppression in the off state. |
| first_indexed | 2024-09-23T13:26:51Z |
| format | Article |
| id | mit-1721.1/91021 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T13:26:51Z |
| publishDate | 2014 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/910212022-10-01T15:20:55Z Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators Weinstein, Dana Popa, Laura Cornelia Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Department of Physics Popa, Laura Cornelia Weinstein, Dana This work presents a new switching mechanism in piezoelectric transduction of AlGaN/GaN bulk acoustic resonators. A piezoelectric transducer is formed in the AlGaN, between a top Schottky electrode and a 2D electron gas (2DEG) as a second electrode. In the off state, this 2DEG can be depleted by applying a negative bias to the top electrode, suppressing transduction and reducing capacitive loading. Switchable AlGaN/GaN resonators are demonstrated from 240MHz to 3.5GHz with frequency-quality factor products up to 1.7×10[superscript 12] in air. Switching is shown in both devices with passive piezoelectric and HEMT sensing, with >19dB suppression in the off state. 2014-10-21T15:04:40Z 2014-10-21T15:04:40Z 2013-06 Article http://purl.org/eprint/type/ConferencePaper 978-1-4673-5983-2 http://hdl.handle.net/1721.1/91021 Popa, Laura C., and Dana Weinstein. “Switchable Piezoelectric Transduction in AlGaN/GaN MEMS Resonators.” 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (June 2013). en_US http://dx.doi.org/10.1109/Transducers.2013.6627304 Proceedings of the 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Institute of Electrical and Electronics Engineers (IEEE) MIT web domain |
| spellingShingle | Weinstein, Dana Popa, Laura Cornelia Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators |
| title | Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators |
| title_full | Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators |
| title_fullStr | Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators |
| title_full_unstemmed | Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators |
| title_short | Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators |
| title_sort | switchable piezoelectric transduction in algan gan mems resonators |
| url | http://hdl.handle.net/1721.1/91021 |
| work_keys_str_mv | AT weinsteindana switchablepiezoelectrictransductioninalganganmemsresonators AT popalauracornelia switchablepiezoelectrictransductioninalganganmemsresonators |