Electrical studies of silicon and low K dielectric material

Electrical studies of silicon and low K dielectric material

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.

Bibliographic Details
Main Author: Ahn, Sang Hoon, 1970-
Other Authors: Lionel C. Kimerling.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Materials Science and Engineering.
Online Access:http://hdl.handle.net/1721.1/9130

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