Sacrificial high-temperature phosphorus diffusion gettering for lifetime improvement of multicrystalline silicon wafers

Sacrificial high-temperature phosphorus diffusion gettering for lifetime improvement of multicrystalline silicon wafers

Thesis: S.M., Massachusetts Institute of Technology, Department of Mechanical Engineering, 2014.

Bibliographic Details
Main Author: Scott, Stephanie Morgan
Other Authors: Tonio Buonassisi.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2014
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/92128

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