Hybrid silicon/silicon carbide microstructures and silicon bond strength tests for the MIT Microengine
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2000.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://theses.mit.edu/Dienst/UI/2.0/Describe/0018.mit.theses%2f2000-90 http://hdl.handle.net/1721.1/9238 |