Resonant body transistors in standard CMOS technology

Resonant body transistors in standard CMOS technology

This work presents Si-based electromechanical resonators fabricated at the transistor level of a standard SOI CMOS technology and realized without the need for any postprocessing or packaging. These so-called Resonant Body Transistors (RBTs) are driven capacitively and sensed by piezoresistively mod...

Полное описание

Библиографические подробности
Главные авторы:	Marathe, Radhika A., Wang, Wentao, Mahmood, Zohaib, Daniel, Luca, Weinstein, Dana
Другие авторы:	Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Формат:	Статья
Язык:	en_US
Опубликовано:	Institute of Electrical and Electronics Engineers (IEEE) 2015
Online-ссылка:	http://hdl.handle.net/1721.1/93887 https://orcid.org/0000-0002-5880-3151

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