Development of a microfabricated turbine-driven air bearing rig
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1999.
Main Author: | Lin, Chuang-Chia, 1968- |
---|---|
Other Authors: | Ain A. Sonin. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/9393 |
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