Creep characterization of single crystal silicon in support of the MIT Micro-Engine Project

Creep characterization of single crystal silicon in support of the MIT Micro-Engine Project

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1999.

Bibliographic Details
Main Author: Walters, Douglas S. (Douglas Scott), 1972-
Other Authors: S. Mark Spearing.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/9441

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