Performance measurements of MEMS analysis system
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/9473 |
| _version_ | 1826216116138016768 |
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| author | Rodríguez, Ramón L. (Ramón Luis), 1976- |
| author2 | Donald E. Troxel. |
| author_facet | Donald E. Troxel. Rodríguez, Ramón L. (Ramón Luis), 1976- |
| author_sort | Rodríguez, Ramón L. (Ramón Luis), 1976- |
| collection | MIT |
| description | Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. |
| first_indexed | 2024-09-23T16:42:34Z |
| format | Thesis |
| id | mit-1721.1/9473 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T16:42:34Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/94732020-03-31T14:37:58Z Performance measurements of MEMS analysis system Performance measurements of micro electromechanical systems analysis system Rodríguez, Ramón L. (Ramón Luis), 1976- Donald E. Troxel. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. Includes bibliographical references (leaves 89-90). Designers and manufacturers of Micro Electromechanical Systems need accurate instruments to examine the mechanical properties of the devices they fabricate. The research presented in this thesis evaluate's the motion detection capabilities of a MEMS Analysis System. The thesis describes two motion detection schemes and the experiments that have been carried out to characterize them. It provides detailed analysis of the results, as well as suggestions as to how to improve each method. Most importantly, however, it establishes a framework in which future performance tests can be based on. by Ramón L. Rodríguez. M.Eng. 2005-08-22T18:38:25Z 2005-08-22T18:38:25Z 1999 1999 Thesis http://hdl.handle.net/1721.1/9473 43558977 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 90 leaves 3658531 bytes 3658286 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Rodríguez, Ramón L. (Ramón Luis), 1976- Performance measurements of MEMS analysis system |
| title | Performance measurements of MEMS analysis system |
| title_full | Performance measurements of MEMS analysis system |
| title_fullStr | Performance measurements of MEMS analysis system |
| title_full_unstemmed | Performance measurements of MEMS analysis system |
| title_short | Performance measurements of MEMS analysis system |
| title_sort | performance measurements of mems analysis system |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/9473 |
| work_keys_str_mv | AT rodriguezramonlramonluis1976 performancemeasurementsofmemsanalysissystem AT rodriguezramonlramonluis1976 performancemeasurementsofmicroelectromechanicalsystemsanalysissystem |