A high-power radio-frequency plasma source
| Main Authors: | , |
|---|---|
| Published: |
MIT Plasma Science and Fusion Center
2015
|
| Online Access: | http://hdl.handle.net/1721.1/94896 |
| _version_ | 1811089733943558144 |
|---|---|
| author | Petty, C.C. Smith, D.K. |
| author_facet | Petty, C.C. Smith, D.K. |
| author_sort | Petty, C.C. |
| collection | MIT |
| first_indexed | 2024-09-23T14:23:51Z |
| id | mit-1721.1/94896 |
| institution | Massachusetts Institute of Technology |
| last_indexed | 2024-09-23T14:23:51Z |
| publishDate | 2015 |
| publisher | MIT Plasma Science and Fusion Center |
| record_format | dspace |
| spelling | mit-1721.1/948962019-04-12T20:42:44Z A high-power radio-frequency plasma source Petty, C.C. Smith, D.K. 2015-02-19T19:29:09Z 2015-02-19T19:29:09Z 2015-02-19 86ja028 http://hdl.handle.net/1721.1/94896 application/pdf MIT Plasma Science and Fusion Center |
| spellingShingle | Petty, C.C. Smith, D.K. A high-power radio-frequency plasma source |
| title | A high-power radio-frequency plasma source |
| title_full | A high-power radio-frequency plasma source |
| title_fullStr | A high-power radio-frequency plasma source |
| title_full_unstemmed | A high-power radio-frequency plasma source |
| title_short | A high-power radio-frequency plasma source |
| title_sort | high power radio frequency plasma source |
| url | http://hdl.handle.net/1721.1/94896 |
| work_keys_str_mv | AT pettycc ahighpowerradiofrequencyplasmasource AT smithdk ahighpowerradiofrequencyplasmasource AT pettycc highpowerradiofrequencyplasmasource AT smithdk highpowerradiofrequencyplasmasource |