Ice and abrasive particles : an alternative CMP polishing technique

Ice and abrasive particles : an alternative CMP polishing technique

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Bibliographic Details
Main Author: Born, Melanie P. (Melanie Providencia), 1975-
Other Authors: Nam P. Suh.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/9570
Description
Summary:Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

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